High accuracy
August 1st 2010

The new MarSurf UD 120 from Mahr can generate both surface and contour measurements in a single pass. Designed for economy, even at high tolerances, the system, based on the MarSurf LD 120, gives high accuracy measurements over a large measuring range in nm resolutions.

The MarSurf UD 120's drive unit enables lengths from 0.1 to 120mm to be traversed at drive speeds between 0.1 and 2mm/s, with a glass scale in the X-direction allowing automatic positioning.

The probe measuring range is 10- 20mm, and the unit's standard LD A14-102/60° diamond probe yields a Z-axis resolution of 2nm and a residual Rz0 value of 60nm. Different probe geometries are available.